The structure and tribological behaviors of CrN and Cr-Ti-N coatings

摘要

The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (111) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (111), (200) and (220) orientation, while for the Ti was introduced, coatings show a preferred orientation of (200). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.