Effect Of Nitrogen Content On The Properties Of Crn_xo_yc_z Coating Prepared By Dc Reactive Magnetron Sputtering

摘要

The CTN_xO_yC_z coatings were deposited by planar DC reactive magnetron sputtering onto AZ31 Mg alloy and high speed tool steel (HSTS) substrates at a substrate temperature of 200 ℃. The effect of N_2 content on composition and structure of the CrN_xO_yC_z coatings was investigated. The structure of the CrN_xO_yC_z coatings was analyzed by a glancing angle X-ray diffraction (GXRD). The cross-section morphology and thickness of the CrN_xO_yC_z coatings were checked by a field emission scanning electron microscope (FESEM), and the composition profile and chemical state were carried out by an X-ray photoelectron spectroscopy (XPS). The experimental results showed that the structure and phase composition of the CrN_xO_yC_z coatings depended on N_2 content. The evolution of the structure of CrN_xO_yC_z coatings was consistent with CrN_x-based coatings, and the CrN_xO_yC_z coatings contained Cr_2O_3, CrO_2, CrO, Cr_3C_2, CrN_x (Cr, CrN, Cr_2N), as well as different chromium oxynitride. However, the carbide and oxynitride were oxidized after annealing.