Infrared Optical Properties Of Ba(zr_(0.20)ti_(0.80))o_3 And Ba(zr_(0.30)ti_(0.70))o_3 Thin Films Prepared By Sol-gel Method

摘要

Ba(Zr_xTi_(1-x))O_3(BZT)(x = 0.20 and 0.30)thin films are deposited on Pt(111)/Ti/SiO_2/Si(100) substrate by sol-gel method. X-ray diffraction patterns show that the thin films have a good crystallinity. Optical properties of the films in the wavelength range of 2.5-12 μm are studied by infrared spectroscopic ellipsometry (IRSE). The optical constants of the BZT thin films are determined by fitting the IRSE data using a classical dispersion formula. As the wavelength increases, the refractive index decreases, while the extinction coefficients increase. The effective static ionic charges are derived, which are smaller than that in a purely ionic material for the BZT thin films.