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Afm And Electronic Transport Studies Of Swift Heavy Ion Irradiated Mn/p-si Bilayer Structure

机译:快速重离子辐照Mn / p-si双层结构的原子力显微镜和电子输运研究

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Mn/p-Si structures have been realised by electron beam evaporation of manganese on etched and cleaned p-Si wafers. Bilayer structures have been irradiated by swift heavy ions (of 100 MeV Fe~(7+) having a fluence of 1 × 10~(13) ions/cm~2). The electronic transport features across the bilayer of the structure (i.e. I-V characteristics across the Mn/p-Si interface) show a significant increase of current (by two orders of magnitude) for the irradiated ones as compared to un-irradiated ones. I-V characteristics across the interface has also been recorded in presence of in-plane (i.e., along the plane of the interface) magnetic field which show a significant magnetic field sensitivity for the irradiated ones. The surface morphological studies from AFM show a granular structure with open face having micro-particles in it, prior to the irradiation and round shaped embedded granular structure after the irradiation. XRD data show the formation of manganese silicide (Mn_5Si_2). The results are understood in the realm of interfacial intermixing which is tailored by the swift heavy ion irradiation.
机译:Mn / p-Si结构已通过在腐蚀和清洁过的p-Si晶片上通过锰电子束蒸发实现。快速的重离子(能量密度为1×10〜(13)离子/ cm〜2的100 MeV Fe〜(7+)辐照了双层结构。跨结构双层的电子传输特征(即跨Mn / p-Si界面的I-V特性)显示,与未辐照的相比,辐照的电流显着增加(两个数量级)。在面内(即沿界面平面)存在磁场的情况下,还记录了跨界面的I-V特性,该磁场对被辐照的磁场表现出显着的磁场敏感性。 AFM的表面形态研究表明,辐照前的颗粒结构具有开放的表面,其中具有微粒,而辐照后则呈圆形的嵌入式颗粒结构。 XRD数据表明形成了硅化锰(Mn_5Si_2)。通过快速重离子辐照量身定制的界面混合领域可以理解结果。

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