Gas Phase Kinetic And Optical Emission Spectroscopy Studies Inplasma-enhanced Hot Filament Catalytic Cvd Production Of carbon Nanotubes

摘要

Optical emission spectroscopy (OES) is used as the main experimental tool for comparison with simulations of the plasma and gas phase composition during plasma-enhanced hot filament catalytic chemical vapor deposition (PE HF CCVD) growth of carbon nanotubes (CNTs). Calculated concentration of more than 45 species in model of the CVD reactor is acquired by Chemkin~(TM) software. Study of different conditions is performed and a close relationship can be found between the nature and the growth rate of carbon nanostructures and the concentration of the active gas phase species. Moreover it is shown that significant changes in the density and morphology of the CNTs grown in the presence of NH_3 could be mainly explained by the gas phase formation of CN and HCN.