Large scale microstructuring on silicon surface in air and liquid by femtosecond laser pulses

摘要

Large-scale microstructures were imprinted on the surface of silicon with dimensions of 1 mm × 1 mm by femtosecond laser line-by-line scanning irradiation. The scanning was made under air and under chlor/hydrogen based liquid layers. Scanning electron microscope investigations evidenced homogeneous surface microstructures, such as: ripples with sub-wavelengths dimensions. Si pillars and directional oriented bacilliform structures. The dependence of the surface morphology on laser energy, scanning speed and irradiation media was analyzed. In air, the microstructure changes from directional-arranged bacilliform structures to well-known ripple structures with a width of about 525 nm. When using the liquid media, we observe ripple structures with a width of about 370 nm and an overlapping of those that evolve in certain regions into Si pillars. The surfaces show interesting gradient topography behaviour which could be used as model scaffolds for the systematic exploration of the role of 3D microano morphology on cell adhesion and growth. By using chlor and hydrogen based liquids we were able to explore the microstructuring of the silicon by line-by-line irradiation process using the femtosecond laser.