Pulsed laser deposition of highly textured La_5Ca_9Cu_(24)O_(41) films on SrLaAlO_4 (100) and Gd_3Ga_5O_(12) (100) substrates

摘要

The growth of La_5Ca_9Cu_(24)O_(41) thin films on SrLaAlO_4 (1 00) and Gd_3Ga_5O_(12) (1 00) substrates by pulsed laser deposition is reported in this paper. The influence of deposition process parameters, such as oxygen pressure, substrate temperature, and laser repetition rate, on the crystallinity, orientation and microstruc-ture of the films has been investigated. X-ray diffraction and atomic force microscopy studies showed a clear dependence of the film crystallographic orientation and morphology (grain size) on the substrate temperature and the oxygen pressure used in the deposition process.