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A comparative evaluation of surface morphology, cohesive and adhesive properties of one-step and two-step thermal deposited chromium thin films on glass substrates

机译:一步和两步热沉积铬薄膜在玻璃基板上的表面形态,内聚性和粘附性的比较评估

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摘要

The surface morphology, cohesive and adhesive properties of one-step and two-step thermal deposited chromium thin films are investigated. Surface characterization is followed by the atomic force microscopy topography images, surface morphology parameters, height distribution histograms and bearing ratio curves with hybrid parameters. Cohesive and adhesive properties of the deposited chromium thin films were evaluated by scratch tests using the progressive loading followed with optical microscopy inspection. The two-step thermal deposition of chromium thin films followed by O_2 plasma treatment after the first deposition gives better mechanical strengths as compared with conventional thermal deposition process. The changes involved in reflectance behavior of the films in UV/vis range are discussed.
机译:研究了一步法和两步法热镀铬薄膜的表面形貌,内聚性和粘附性。表面表征后是原子力显微镜形貌图像,表面形态参数,高度分布直方图和带有混合参数的承载比曲线。沉积的铬薄膜的内聚性和粘附性通过渐进载荷的划痕测试进行了评估,随后进行了光学显微镜检查。与常规热沉积工艺相比,铬薄膜的两步热沉积,然后在首次沉积后进行O_2等离子体处理,可提供更好的机械强度。讨论了膜的反射行为在紫外线/可见光范围内的变化。

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  • 来源
    《Applied Surface Science》 |2012年第19期|p.7633-7638|共6页
  • 作者单位

    Institute of Material Science, Kaunas University of Technology, Savanoriu 271,3009 Kaunas, Lithuania;

    Institute of Material Science, Kaunas University of Technology, Savanoriu 271,3009 Kaunas, Lithuania;

    CSM Instruments SA, Rue de la Care 4,2034 Peseux, Switzerland;

    CSM Instruments SA, Rue de la Care 4,2034 Peseux, Switzerland;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    chromium films; thermal deposition; oxygen plasma; AFM; scratch test;

    机译:铬膜热沉积氧等离子体原子力显微镜划痕测试;
  • 入库时间 2022-08-18 03:06:44

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