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Fabrication of patterned reduced graphene oxide nanosheet field-emission cathodic film at room-temperature

机译:室温下图案化还原氧化石墨烯纳米片场发射阴极膜的制备

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摘要

Well defined patterns of SU-8 photoresist were fabricated using typical photolithographic process on high conductive silicon substrate. Electrophoretic deposition of reduced graphene oxide nanosheets (RGOS) on patterned SU-8 photoresist was conducted at room-temperature. The thin SU-8 photoresist could prevent the transverse deposition of RGOS over the photoresist areas to some extent. A little amount of RGOS at SU-8 photoresist areas were removed by rinsing treatment due to the hydrophobic nature of SU-8 and result in the formation of patterned RGOS films. The field-emission properties of patterned RGOS films show low turn-on electrical field and high current density. The low-cost and scale-up fabrication method can be easily utilized for assembly and integration of RGOS into patterned RGOS film for the field emission display applications at room-temperature.
机译:使用典型的光刻工艺在高导电硅衬底上制造了清晰的SU-8光致抗蚀剂图案。在室温下将还原的氧化石墨烯纳米片(RGOS)电泳沉积在图案化的SU-8光致抗蚀剂上。薄的SU-8光致抗蚀剂可以在一定程度上防止RGOS在光致抗蚀剂区域上的横向沉积。由于SU-8的疏水性,在SU-8光刻胶区域通过冲洗处理去除了少量的RGOS,并形成了图案化的RGOS膜。图案化的RGOS薄膜的场发射特性显示出低的开启电场和高的电流密度。低成本和按比例放大的制造方法可以轻松地用于将RGOS组装和集成到图案化的RGOS膜中,从而在室温下进行场发射显示应用。

著录项

  • 来源
    《Applied Surface Science》 |2013年第15期|81-86|共6页
  • 作者

    Yitian Peng; Di Huang;

  • 作者单位

    Jiangsu Key Laboratory of Design and Manufacture of Micro/Nano Bio-medical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 217189, China,Suzhou Research institute of Southeast University, Suzhou 215123, China;

    Jiangsu Key Laboratory of Design and Manufacture of Micro/Nano Bio-medical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 217189, China,Suzhou Research institute of Southeast University, Suzhou 215123, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Reduced graphene oxide nanosheets; Patterned; Field-emission; Electrophoretic deposition;

    机译:还原的氧化石墨烯纳米片;图案化场发射;电泳沉积;

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