Controllable atomic layer deposition of one-dimensional nanotubular TiO_2

摘要

This study aimed at synthesizing one-dimensional (1D) nanostructures of TiO_2 using atomic layer deposition (ALD) on anodic aluminum oxide (AAO) templates and carbon nanotubes (CNTs). The precursors used are titanium tetraisopropoxide (TTIP, Ti(OCH(CH_3)_2)_4) and deionized water. It was found that the morphologies and structural phases of as-deposited TiO_2 are controllable through adjusting cycling numbers of ALD and growth temperatures. Commonly, a low temperature (150 ℃) produced amorphous TiO_2 while a high temperature (250 ℃) led to crystalline anatase TiO_2 on both AAO and CNTs. In addition, it was revealed that the deposition of TiO_2 is also subject to the influences of the applied substrates. The work well demonstrated that ALD is a precise route to synthesize 1D nanostructures of TiO_2. The resultant nanostructured TiO_2 can be important candidates in many applications, such as water splitting, solar cells, lithium-ion batteries, and gas sensors.