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首页> 外文期刊>Applied Surface Science >An XPS study of bromine in methanol etching and hydrogen peroxide passivation treatments for cadmium zinc telluride radiation detectors
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An XPS study of bromine in methanol etching and hydrogen peroxide passivation treatments for cadmium zinc telluride radiation detectors

机译:XPS研究碲化镉锌辐射探测器在甲醇蚀刻和过氧化氢钝化处理中的溴

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摘要

The performance of single crystal CdZnTe radiation detectors is dependent on both the bulk and the surface properties of the material. After single crystal fabrication and mechanical polishing, modification of the surface to remove damage and reduce the surface leakage current is generally achieved through chemical etching followed by a passivation treatment. In this work, CdZnTe single crystals have been chemically etched using a bromine in methanol (BM) treatment. The BM concentrations employed were 0.2 and 2.0 (v/v) % and exposure times varied between 5 and 120 s. Angle resolved XPS and sputter depth profiling has been employed to characterize the surfaces for the different exposure conditions. A Te rich surface layer was formed for all exposures and the layer thickness was found to be independent of exposure time. The enriched Te layer thickness was accurately determined by calibrating the sputter rate against a CdTe layer of known thickness. For BM concentrations of 0.2 (v/v) % and 2 (v/v) %, the Te layer thickness was determined to be 1.3 ±0.2 and 1.8±0.2nm, respectively. The BM etched surfaces have subsequently been passivated in a 30wt.% H_2O_2 solution employing exposure time of 15 s. The oxide layer thickness has been calculated using two standard XPS methodologies, based on the Beer-Lambert expression. The TeO_2 thickness calculated from ARXPS data are slightly higher than the thickness obtained by the simplified Beer-Lambert expression. For BM exposures of 30-120 s followed by a passivation treatment of 30 wt. % H_2O_2 solution employing an exposure time 15 s, the ARXPS method gave an average TeO_2 thickness value of 1.20 nm and the simplified Beer-Lambert expression gave an average thickness value of 0.99 nm.
机译:单晶CdZnTe辐射探测器的性能取决于材料的体积和表面特性。在单晶制造和机械抛光之后,通常通过化学蚀刻然后进行钝化处理来实现表面改性以去除损伤并减小表面漏电流。在这项工作中,已使用溴在甲醇(BM)中对CdZnTe单晶进行了化学蚀刻。所采用的BM浓度为0.2和2.0(v / v)%,暴露时间在5到120 s之间变化。角度分辨XPS和溅射深度分析已用于表征不同曝光条件下的表面。对于所有曝光都形成富Te表面层,并且发现该层厚度与曝光时间无关。通过针对已知厚度的CdTe层校准溅射速率,可以准确确定富集的Te层的厚度。对于0.2(v / v)%和2(v / v)%的BM浓度,确定的Te层厚度分别为1.3±0.2和1.8±0.2nm。随后将BM蚀刻的表面在30 wt。%H_2O_2溶液中钝化,采用15 s的暴露时间。氧化层厚度已根据Beer-Lambert表达式使用两种标准XPS方法计算得出。根据ARXPS数据计算得出的TeO_2厚度略高于通过简化的Beer-Lambert表达式获得的厚度。对于BM暴露30-120 s,然后进行30 wt。%的钝化处理。使用曝光时间15 s的%H_2O_2溶液,ARXPS方法得出的平均TeO_2厚度值为1.20 nm,简化的Beer-Lambert表达式给出的平均厚度值为0.99 nm。

著录项

  • 来源
    《Applied Surface Science 》 |2013年第1期| 681-686| 共6页
  • 作者单位

    Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, Surrey GU2 7XH, UK;

    Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, Surrey GU2 7XH, UK;

    Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, Surrey GU2 7XH, UK;

    Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, Surrey GU2 7XH, UK;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    cadmium zinc telluride; CZT; XPS; passivation; oxide thickness;

    机译:碲化镉锌;CZT;XPS;钝化氧化层厚度;

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