A capacitive chemical sensor based on porous silicon for detection of polar and non-polar organic solvents

摘要

A capacitive sensor based on porous silicon (PSi) for detection of various polar (ethanol, methanol, acetone, acetonitrile, chloroform) and non-polar organic solvents (n-hexane, toluene) was described. The meso-PSi layer with an average pore size of 30 nm was prepared by a galvanostatic electrochemical etching of crystalline silicon in HF-based solution. Surface passivation was conducted by anodic oxidation process and the electrical contacts were made exclusively onto the front porous structure. The as-fabricated sensor exhibits highly sensitive and reversible response toward polar organic molecules during the real-time measurements of capacitance, whereas the capacitive sensing behavior was irreversible and opposite in direction in case of non-polar solvents. The response time was in the order of acetone ＜ methanol ＜ acetonitrile ＜ ethanol ＜ chloroform. The observed response could be understood as the impact of charge redistribution on the pore walls upon organic infiltration, along with changes in the dielectric constant of the porous layer. A comparative study of such different responses is provided. Excellent repeatability of the device was obtained after twelve cyclic tests of acetone, demonstrating stability of the sensor. Long-term stability for the sensor was also observed after four weeks storage. The present approach is useful for the development of a simple, cost-effective sensor for detection of various chemical analytes.