Deposition of titanium coating on SiC fiber by chemical vapor deposition with Ti-I-2 system

摘要

Titanium coating was prepared on SiC fiber using titanium-iodine (Ti-I-2) mixture by hot-wall chemical vapor deposition. Thermodynamic analysis and experimental observation were carried out in this work. The thermodynamic analysis of the reactions in the Ti-I-2 system indicates that Ti and I-2 raw powder materials transform to titanium coating as follows: Ti +I-2 -> (TiI2, TiI3), and (TiI2, TiI3) -> Ti. In theory, the conversions of TiI3 and TiI2 reach the maximum when Ti:I-2 is 1:1.5, while in actual experiment that reached the maximum when Ti:I-2 was 1:2, as there existed the waste of I-2 due to sublimation. Typical deposited coating is relatively flat and uniform. However, as SiC is prone to react with Ti at high temperatures, the obtained coating contained some Si and C elements except for Ti. So the coating was not a pure Ti coating but contained some carbides and silicides. Deposition rate of the coating increased with the increase of temperature. The deposited thickness increased with the increase of heat preservation time, and achieved the maximum thickness at 90 min. (C) 2017 Elsevier B.V. All rights reserved.