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Microstructure and opto-electronic properties of Sn-rich Au-Sn diffusive solders

机译:富锡金锡扩散焊料的微观结构和光电性能

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摘要

Microstructural and opto-electronic properties of Au/Sn and SnAu bilayers, obtained by sequential evaporating of metals on the Si substrate, were investigated by means of atomic force microscopy, X-ray diffraction and spectroscopic ellipsometry. Thicknesses of individual films were established to obtain the atomic ratio of Au:Sn atoms 1: 1, 1: 2 and 1: 4, which were favor the formation of AuSn, AuSn2 and AuSn4, respectively. However, the produced intermatallic compounds were detected as AuSn and AuSn2. Additionally, the unbounded Sn was found. The sequence of deposition of Au and Sn films as well as their thickness strongly affect on the composition, microstructure, optical and electrical properties of the produced layers. The Au/Sn (Sn on the top) layers were more smooth than SnAu (Au on the top) films. Generally, the Au/Sn layers exhibit a better electrical and optical properties than SnAu films. The optical parameters: plasma energy, free-carrier damping, mean relaxation time of conduction electrons and optical resistivity were determined from the effective complex dielectric function of the formed Au, Sn and Au-Sn films. The optical resistivity values are in the range from 17.8 mu Omega cm to 85.1 mu Omega cm and from 29.6 mu Omega cm to 113.3 mu Omega cm for Au/Sn and SnAu layers, respectively. (C) 2018 Elsevier B.V. All rights reserved.
机译:通过原子力显微镜,X射线衍射和椭圆偏振光谱法研究了通过在Si衬底上依次蒸镀金属而获得的Au / Sn和SnAu双层薄膜的微结构和光电性能。确定各个膜的厚度以获得Au:Sn原子的原子比为1:1、1:2和1:4,分别有利于AuSn,AuSn2和AuSn4的形成。但是,产生的金属间化合物被检测为AuSn和AuSn2。此外,发现了无界锡。 Au和Sn膜的沉积顺序及其厚度强烈影响所生产层的组成,微结构,光学和电学性质。 Au / Sn(顶部的Sn)层比SnAu(顶部的Au)膜更光滑。通常,Au / Sn层比SnAu膜具有更好的电学和光学特性。光学参数:等离子体能量,自由载流子阻尼,导电电子的平均弛豫时间和光学电阻率由所形成的Au,Sn和Au-Sn薄膜的有效复介电函数确定。对于Au / Sn和SnAu层,其电阻率值分别在17.8μΩ·cm至85.1μΩ·cm和29.6μΩ·cm至113.3μΩ·cm的范围内。 (C)2018 Elsevier B.V.保留所有权利。

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