Large-area growth of superconducting Y-Ba-Cu-O films by hot-wall sputtering method

摘要

Superconducting Y-Ba-Cu-O films have been deposited on [001]MgO substrates with a diameter of two inches using a simple, economic hot-wall DC sputtering system. The deposition chamber was made of a quartz tube and heated by a tube-furnace outside the chamber. The deposited films are highly oriented with perpendicular to the surface of the The superconducting properties of the films across the 2-inch-diameter area are zero resistance temperatures T/sub c/(R=0) of 88-90 K and critical current densities J/sub c/(77 K) of 1.6-3.5/spl times/10/sup 6/ A/cm/sup 2/.