Preparation and characterization of La_(0.8)Sr_(0.2)MnO_3 thin films by an excimer laser MOD process for a bolometer

摘要

La_(0.8)Sr_(0.2)MnO_3 (LSMO) films were prepared on LaAlO_3 substrates by excimer laser metal organic deposition (ELMOD) at 500℃. The temperature dependence of resistance of the LSMO films was investigated by changing the laser flu-ence, irradiation time, and film thickness. It was found that the resistance of the LSMO films 80 nm in thickness that were irradiated by an ArF laser at a fluence of 100 mJ/cm~2 for 60 min showed a metallic temperature dependence, and the maximum temperature coefficient of resistance of the films (defined as 1/R x dR/dT) was 3.4% at 265 K.