Platinum film patterning by laser lift-off using hydrocarbon film on insulating substrates

摘要

We achieved a successful laser lift-off of Pt films on fused quartz substrate, employing novel technique using a laser-patterned Apiezon wax, successive uniform Pt deposition, and final laser lift-off. The successful laser lift-off of the Pt film on fused quartz substrate using the wax suggests that the much lower decomposition temperature of the wax than that of the fused quartz is important as well as the difference in the thermal conductivity.