Investigation of electrical and optical properties of ZnO thin films grown with O_2/O_3 gas mixture

H.S. KIM; J.-M. ERIE; S.T. PEARTON; D.P. NORTON; F. REN

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Investigation of electrical and optical properties of ZnO thin films grown with O_2/O_3 gas mixture

机译：O_2 / O_3混合气体生长ZnO薄膜的电学和光学性质研究

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The electrical and optical properties of ZnO thin films grown with an O_2/O_3 gas mixture are compared with samples grown with pure oxygen gas. The ZnO films were grown on sapphire(OOOl) by pulsed laser deposition. The residual background carrier concentr

机译：将用O_2 / O_3气体混合物生长的ZnO薄膜的电学和光学性质与用纯氧气生长的样品进行比较。 ZnO薄膜通过脉冲激光沉积在蓝宝石（OOOl）上生长。残留背景载流子浓度

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《Applied Physics A: Materials Science & Processing》 |2008年第2期|251-254|共4页
作者
H.S. KIM; J.-M. ERIE; S.T. PEARTON; D.P. NORTON; F. REN;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
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关键词
Ⅱ-Ⅵ semiconductors; Ⅱ-Ⅵ semiconductors; Ⅱ-Ⅵ semiconductors; laser deposition;

机译：Ⅱ-Ⅵ半导体;Ⅱ-Ⅵ半导体;Ⅱ-Ⅵ半导体;激光沉积;

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Investigation of electrical and optical properties of ZnO thin films grown with O_2/O_3 gas mixture

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