Femtosecond laser drilling of alumina ceramic substrates

摘要

In the paper, the result on femtosecond laser drilling of alumina ceramic substrate was reported. The effects of various laser parameters such as different focus position, traverse speed, drilling pattern, pausing time, etc. on the drilled hole quality in terms of surface finish, heat affected zone (HAZ), hole circularity, debris, microcracks were studied. The quality of laser-drilled holes on alumina ceramic substrates was evaluated with optical microscope, SEM/EDX, and X-ray μ-CT analysis. The optimum drilling conditions were identified. High-quality laser-drilled holes on alumina ceramic substrates were demonstrated. The developed process has potential application in manufacturing of alumina substrate based electronic devices.