SPM bipolar pulsed nanostructuring of graphitic layers

摘要

Abstract Local ablation of graphitic layers by SPM probe was investigated. The gap between the tip and sample surface was varied. Mono and bipolar electric impulses were applied. Influence of various processing parameters on graphite ablation rates was investigated. Shallow craters and structures with halfwidth as low as 15 nm were produced. Electromechanical mechanism of graphite nanoablation is discussed.