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Design and characterization of high-performance autofocusing microscope with zoom in/out functions

机译:具有放大/缩小功能的高性能自动聚焦显微镜的设计与表征

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摘要

Autofocusing is a critical function in on-line or off-line automated vision inspection in the manufacturing fields. Accordingly, design of high-performance autofocusing microscopes is an important issue. The present group recently developed a novel laser-based autofocusing microscope comprising two optical paths, which provided a large linear autofocusing range and a rapid response with no reduction in the focusing accuracy (Liu et al. in Appl Phys B 109:259-268, 2012). In the present study, the focusing response of the developed autofocusing microscope is further improved by replacing the two optical paths with one tunable optical zoom system. The proposed autofocusing microscope is characterized numerically by means of commercial software ZEMAX simulations and is then verified experimentally using a laboratory-built prototype. The simulation and experimental results show that compared to the developed autofocusing microscope with two optical paths, the proposed autofocusing microscope achieves a rapid focusing response (less than 3.5 s) under the same autofocusing range (+/- 1500 mu m) and focusing accuracy (focusing accuracy of a parts per thousand currency sign1 mu m, repeatability of +/- 1 mu m). Consequently, it confirms the proposed autofocusing microscope has potential for automated vision inspection and optical applications.
机译:自动对焦是制造领域中在线或离线自动视觉检查的关键功能。因此,高性能自动聚焦显微镜的设计是一个重要的问题。本小组最近开发了一种新颖的基于激光的自动聚焦显微镜,该显微镜具有两个光路,提供了较大的线性自动聚焦范围,并且响应速度很快,且聚焦精度没有降低(Liu等人,Appl Phys B 109:259-268, 2012)。在本研究中,通过用一个可调光学变焦系统代替两条光路,进一步改善了开发的自动聚焦显微镜的聚焦响应。所提出的自动聚焦显微镜通过商业软件ZEMAX仿真进行数字表征,然后使用实验室制造的原型进行实验验证。仿真和实验结果表明,与已开发的具有两条光路的自动聚焦显微镜相比,该自动聚焦显微镜在相同的自动聚焦范围(+/- 1500μm)和聚焦精度(聚焦精度为每千个货币符号1微米,重复精度+/- 1微米)。因此,它证实了所提出的自动聚焦显微镜具有自动视觉检查和光学应用的潜力。

著录项

  • 来源
    《Applied physics》 |2015年第1期|69-80|共12页
  • 作者单位

    Natl Chung Cheng Univ, Dept Mech Engn, Minhsiung Township 62102, Chiayi County, Taiwan.;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-18 03:08:04

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