Combined effect of EUV irradiation and acetone treatment on PET surface

摘要

In this work, the radiation from a laser-plasma extreme ultraviolet (EUV) source based on a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET). The spectrum of the wide band radiation focused with a gold-coated ellipsoidal collector consisted of a narrow feature with maximum at 10 nm and a long-wavelength tail up to 70 nm. The PET samples were mounted in the focal plane of the EUV collector or at some distance downstream this plane and irradiated for 0.1 s–2 min with 10-Hz repetition rate. The polymer samples after irradiation were rinsed in acetone. Surface morphologies of the PET samples after irradiation were investigated using a scanning electron microscope and atomic force microscope. Different kinds of surface micro- and nanostructures were created as a result of irradiation depending on the EUV fluence and number of pulses. Acetone treatment of the polymer samples after irradiation resulted in formation of additional nanostructures. In this case the nanostructures were revealed even after exposure with a single EUV pulse.