Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems

摘要

In the present study, we investigate the mechanical properties, residual stress, and microprocessing compatibility of Fe67.5B22.5Nd6.3Nb3.7 metallic glass thin films (Fe-MGTFs). The mechanical properties are measured using a specially designed microtensile tester. The fracture toughness of the Fe-MGTF (6.36 MPa × m1/2) is more than twice that of Si, and the highest among the thin films developed for microelectromechanical systems (MEMS) to this point. In addition, the fabrication of freestanding microcantilevers illustrates the low residual stress and high microprocessing compatibility of Fe-MGTFs. The present study verifies the great potential of Fe-MGTFs for use in MEMS.