Field effect modulated nanofluidic diode membrane based on Al2O3/W heterogeneous nanopore arrays

摘要

We developed Al2O3/W heterogeneous nanopore arrays for field effect modulated nanofluidic diodes. They are fabricated by transferring self-organized nanopores of anodic aluminium oxide into a W thin film. The nanopores are ～20?nm in diameter and 400?nm in length. After mild oxidation, approximately 10?nm WO3 grows on the surface of W, forming a conformal and dense dielectric layer. It allows the application of an electrical field through the surrounding W electrode to modulate the ionic transport across the entire membrane. Our experimental findings have potential applications in high throughput controlled delivery and electrostatic sorting of biomolecules.