Laser triggered Z-pinch broadband extreme ultraviolet source for metrology

摘要

We compare the extreme ultraviolet emission characteristics of tin and galinstan (atomic %: Ga: 78.35, In: 14.93, Sn: 6.72) between 10?nm and 18?nm in a laser-triggered discharge between liquid metal-coated electrodes. Over this wavelength range, the energy conversion efficiency for galinstan is approximately half that of tin, but the spectrum is less strongly peaked in the 13–15?nm region. The extreme ultraviolet source dimensions were 110?±?25?μm diameter and 500?±?125?μm length. The flatter spectrum, and -19?°C melting point, makes this galinstan discharge a relatively simple high radiance extreme ultraviolet light source for metrology and scientific applications.