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Micromachined piezoelectric microphones with in-plane directivity

机译:面内指向性的微机械压电麦克风

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Micromachined piezoelectric microphones with in-plane directivity are introduced. A beam rotates about center torsional pivots and is attached to piezoelectrically active end-springs. Rotation of the beam in response to sound pressure gradients produces spring deflections, which, in turn, produce an open-circuit voltage at the piezoelectric films. Prototypes are presented that contain a 20-μm-thick silicon beam and end-springs with 900-nm-thick chemical solution deposited lead zirconate titanate atop the surface of the end-springs. Acoustic directivity measurements are presented that confirm device functionality.
机译:介绍了具有面内指向性的微机械压电麦克风。梁围绕中心扭转枢轴旋转,并连接到压电有源端弹簧。光束响应于声压梯度的旋转会产生弹簧挠度,而弹簧挠度又会在压电薄膜上产生开路电压。提出的原型包含20μm厚的硅束和末端弹簧,在末端弹簧表面上沉积有900nm厚的化学溶液的锆钛酸铅钛酸盐。提出了声学方向性测量,以确认设备的功能。

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