Microstructural defects in GaN thin films grown on chemically vapor-deposited graphene layers

摘要

Microstructural defects in GaN thin films grown on graphene produced via chemical vapor deposition have been investigated using electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM). EBSD analysis reveals the preferred orientations of the GaN films. We further examined the microstructural defects such as grain boundaries and threading dislocations present in the films using TEM. Plan-view TEM analysis showed presence of both high- and low-angle grain boundaries and the threading dislocations mostly bound to those grain boundaries. Moreover, the characteristics and behavior of the threading dislocations were also investigated using cross-section TEM analysis.