GaN/AlGaN waveguide quantum cascade photodetectors at λ ≈ 1.55 μm with enhanced responsivity and ∼40 GHz frequency bandwidth

摘要

We report on ultrafast GaN/AlGaN waveguide quantum cascade detectors with a peak detection wavelength of 1.5 μm. Mesa devices with a size of 7 × 7 and 10 × 10 μm2 have been fabricated with radio-frequency impedance-matched access lines. A strong enhancement of the responsivity is reported by illuminating the waveguide facet, with respect to illumination of the top surface. The room temperature responsivity is estimated to be higher than 9.5 ± 2 and 7.8 ± 2 mA/W, while the -3dB frequency response is extracted to be 42 and 37.4 GHz for 7 × 7 and 10 × 10 μm2 devices, respectively.