Self-repairing characteristics in the solid-state Al2O3 film capacitors

摘要

The effect of the top electrode material on electrical characteristics of Al2O3 thin film capacitors has been investigated. Compared to devices with Pt top electrodes, devices using Al as the top electrode material exhibit a significantly reduced leakage current and a much higher breakdown strength. These electrical characteristics are linked to the anodic oxidation reaction, which makes the capacitors have the capability of self-repairing the defects in a high electric field.