Microscaled and nanoscaled platinum sensors

摘要

We show small and robust platinum resistive heaters and thermometers that are defined bynmicrolithography on silicon substrates. These devices can be used for a wide range of applications,nincluding thermal sensor arrays, programmable thermal sources, and even incandescent lightnemitters. To explore the miniaturization of such devices, we have developed microscaled andnnanoscaled platinum resistor arrays with wire widths as small as 75 nm, fabricated lithographicallynto provide highly localized heating and accurate resistance u0002and hence temperatureu0003 measurements.nWe present some of these potential applications of microfabricated platinum resistors in sensing andnspectroscopy.