Flexible high-frequency microwave inductors and capacitors integrated on a polyethylene terephthalate substrate

摘要

This letter reports the realization of bendable inductors and capacitors integrated on a polyethylenenterephthalate substrate that can operate at high microwave frequencies. A low-temperaturenfabrication process compatible with flexible thin-film transistors u0001TFTsu0002 was developed. Bynemploying bendable dielectric materials, spiral inductors and metal-insulator-metal capacitors withnhigh quality factors and high resonance frequencies were demonstrated. The effects of mechanicalnbending on the performance of inductors and capacitors were also measured and analyzed. Thesendemonstrations combined with previously demonstrated microwave TFTs will lead to flexiblenradio-frequency and microwave systems in the future. © 2010 American Institute of Physics.nu0003doi:10.1063/1.3280040