机译:低压电容射频等离子体中的相似性定律与频率缩放
Department of Computational Mathematics Science and Engineering Michigan State University East Lansing Michigan 48824 USA Department of Electrical and Computer Engineering Michigan State University East Lansing Michigan 48824 USA;
Fraunhofer Center for Coatings and Diamond Technologies Michigan State University East Lansing Michigan 48824 USA;
Department of Computational Mathematics Science and Engineering Michigan State University East Lansing Michigan 48824 USA Department of Electrical and Computer Engineering Michigan State University East Lansing Michigan 48824 USA;
Department of Electrical and Computer Engineering Michigan State University East Lansing Michigan 48824 USA;
Department of Electrical and Computer Engineering Michigan State University East Lansing Michigan 48824 USA Fraunhofer Center for Coatings and Diamond Technologies Michigan State University East Lansing Michigan 48824 USA Department of Chemical Engineering and Materials Science Michigan State University East Lansing Michigan 48824 USA;
Department of Computational Mathematics Science and Engineering Michigan State University East Lansing Michigan 48824 USA Department of Electrical and Computer Engineering Michigan State University East Lansing Michigan 48824 USA;
机译:电子感应二次电子对低压电容耦合射频等离子体特性的影响
机译:用于低压电容耦合射频放电等离子体的场探头
机译:低压射频电容放电中边界表面的等离子体相互作用
机译:低压下电容耦合等离子体射频放电中的电子加热动力学
机译:低压电容性射频中的护套加热会放电。
机译:简洁的法律作为一个扩展法以及Zipf的词汇频率的可能起源
机译:工业双频电容耦合射频放电中的空间和相位分辨等离子体参数
机译:使用二维模拟验证电容射频放电的频率调整规律