Superconducting microwire detectors based on WSi with single-photon sensitivity in the near-infrared

摘要

We report on the fabrication and characterization of single-photon-sensitive WSi superconducting detectors with wire widths from 1 μm to 3μm. The devices achieve the saturated internal detection efficiency at a wavelength of 1.55 μm and exhibit maximum count rates in excess of 10~5 s~(-1). We also investigate the material properties of the silicon-rich WSi films used for these devices. We find that many devices with active lengths of several hundred micrometers exhibit critical currents in excess of 50% of the depairing current. A meandered detector with a 2.0 μm wire width is demonstrated over a surface area of 362 × 362 μm~2, showcasing the material and device quality achieved.