Hybrid silicon on silicon carbide integrated photonics platform

摘要

We demonstrate a hybrid on-chip photonics platform based on crystalline silicon resonators and waveguides patterned on top of silicon carbide. The devices were fabricated with membrane transfer followed by standard electron beam patterning procedures. The platform allows the integration of high quality silicon photonics with color centers in silicon carbide operating in the near infrared for spin-photon interfaces used in quantum information processing applications. We measure waveguide-coupled ring resonators with loaded quality factors up to 23 000 at cryogenic temperatures.