Anisotropic conductivity of silver thin films grown on silicon (100) vicinal surfaces

摘要

The electrical conductivity between 4 and 300 K of Ag thin films (up to 30 nm grown at room temperature on Si(100) vicinal surfaces has been measured and their morphology imaged with an atomic force microscope. A noticeable anisotropy of the resistivity of the films which is related to the structure of the films has been found.