Lattice location and thermal stability of implanted Fe in ZnO

摘要

The emission channeling technique was applied to evaluate the lattice location of implanted ~(59)Fe in single-crystalline ZnO. The angular distribution of β~(-) particles emitted by ~(59)Fe was monitored with a position-sensitive electron detector, following 60 keV low dose (2.0×10~(13) cm~(-2)) room-temperature implantation of the precursor isotope ~(59)Mn. The emission patterns around the [0001], [1102],[1101], and [2113] directions revealed that following annealing at 800℃, 95(8)% of the Fe atoms occupy ideal substitutional Zn sites with rms displacements of 0.06-0.09 A.