Planar Hall effect sensor for magnetic micro- and nanobead detection

摘要

Magnetic bead sensors based on the planar Hall effect in thin films of exchange-biased permalloy have been fabricated and characterized. Typical sensitivities are 3 μV/Oe mA. The sensor response to an applied magnetic field has been measured without and with coatings of commercially available 2 μm and 250 nm magnetic beads used for bioapplications (Micromer-M and Nanomag-D, Micromod, Germany). Detection of both types of beads and single bead detection of 2 μm beads is demonstrated, i.e., the technique is feasible for magnetic biosensors. Single 2 μm beads yield 300 nV signals at 10 mA and 15 Oe applied field.