Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors

摘要

Based on the achievement of synthesis of ZnO nanowires in mass production, ZnO nanowires gas sensors were fabricated with microelectromechanical system technology and ethanol-sensing characteristics were investigated. The sensor exhibited high sensitivity and fast response to ethanol gas at a work temperature of 300℃. Our results demonstrate the potential application of ZnO. nanowires for fabricating highly sensitive gas sensors.