Fields analysis of enhanced charge collection in nanoscale grated photo detectors

摘要

Electromagnetic energy transmitted through the gratings in the active region 6f a metal-semiconductor-metal detector was analyzed to account for enhanced collection efficiency. This study shows that a wall-like grating on the surface of the active region results in enhanced transmission of electromagnetic energy, which contributes to greater carrier production and higher collection efficiency. Analyses also show that the collection efficiency can be further improved with square gratings on the surface of the active region. A maximum in collection efficiency is achieved when the square gratings cover about 65.5% of the active region surface.