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Strain mapping with parts-per-million resolution in synthetic type-Ib diamond plates

机译:合成Ib型金刚石板中百万分之一分辨率的应变图

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A general method to map strain with parts per million (ppm) resolution in single-crystal wafers and plates is demonstrated. An x-ray technique has been used to obtain separate maps of strain and tilt across synthetic diamond growth sectors. Data consisting of rocking curve maps obtained with a charge coupled device detector were analyzed. The strain results image the growth sectors and reveal a strain pileup near the sector boundaries. The diamond was yellow to the eye due to nitrogen impurities. Not only the topography of the strain map, but also the strain magnitudes, are consistent with the strain arising from nitrogen impurities. High strain resolution in the ppm range is needed to observe these effects.
机译:演示了在单晶晶片和板中绘制具有百万分之一(ppm)分辨率的应变的通用方法。 X射线技术已被用来获得整个合成钻石生长区的应变和倾斜度的独立图。分析了由用电荷耦合器件检测器获得的摇摆曲线图组成的数据。应变结果显示了生长扇区的图像,并显示了扇区边界附近的应变堆积。由于氮杂质,钻石对眼睛呈黄色。不仅应变图的地形,而且应变大小也与氮杂质引起的应变一致。要观察这些影响,需要在ppm范围内具有较高的应变分辨率。

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