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Atomic layer deposition of ZnO on ultralow-density nanoporous silica aerogel monoliths

机译:ZnO在超低密度纳米多孔二氧化硅气凝胶整料上的原子层沉积

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摘要

We report on atomic layer deposition of an ~2-nm-thick ZnO layer on the inner surface of ultralow-density (~0.5% of the full density) nanoporous silica aerogel monoliths with an extremely large effective aspect ratio of ~ 10~5 (defined as the ratio of the monolith thickness to the average pore size). The resultant monoliths are formed by amorphous-SiO_2 core/wurtzite-ZnO shell nanoparticles which are randomly oriented and interconnected into an open-cell network with an apparent density of ~3% and a surface area of ~100 m~2 g~(-1). Secondary ion mass spectrometry and high-resolution transmission electron microscopy imaging reveal excellent uniformity and crystallinity of ZnO coating. Oxygen K-edge and Zn L_3-edge soft x-ray absorption near-edge structure spectroscopy shows broadened O p- as well as Zn s- and d-projected densities of states in the conduction band.
机译:我们报道了在超低密度(约占总密度的0.5%)纳米多孔二氧化硅气凝胶整料的内表面上有一个约2nm厚的ZnO层的原子层沉积,其有效长径比非常大,约为10〜5(定义为整体厚度与平均孔径之比)。所得的整体结构是由无定形的SiO_2核/纤锌矿型ZnO壳纳米粒子形成的,它们随机取向并互连成表观密度为〜3%和表面积为〜100 m〜2 g〜(-的开孔网络。 1)。二次离子质谱和高分辨率透射电子显微镜成像显示ZnO涂层具有出色的均匀性和结晶性。氧K边缘和Zn L_3边缘软X射线吸收近边缘结构光谱显示,导带中的O p-以及Zn s和d投影的态密度增加了。

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