Crack-free highly reflective AlInN/AlGaN Bragg mirrors for UV applications

摘要

We report the growth of highly reflective distributed Bragg reflectors (DBRs) in the UV region using the Al_(0.85)In_(0.15)N/Al_(0.2)Ga_(0.8)N lattice-matched system. The DBRs were deposited on nearly strain-free Al_(0.2)Ga_(0.8)N templates to avoid strain-induced structural degradations. The appearance of cracks was then completely suppressed. The DBRs exhibit a reflectivity higher than 99% at a wavelength as short as ～340 nm and a stop band width of 215 meV (20 nm).