Nanoimprinting of conductive tracks using metal nanopowders

摘要

A method for metal nanopowder imprinting is proposed as a patterning process for conductive tracks, which is inexpensive and scalable down to submicrometers. To examine the feasibility of the proposed method, conductive tracks with widths of submicrometers to a few tens of micrometers were formed using a thermal nanoimprinting system, and the effects of processing conditions on the degree of replication and the degree of sintering and the electric conductivity of imprinted conductive tracks were analyzed.