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Subpicoliter Droplet Generation Based On A Nozzle-free Acoustic Transducer

机译:基于无喷嘴声换能器的亚皮升液滴生成

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This letter reports picoliter liquid droplet generation using an orifice-free acoustic ejector operating at its harmonic frequencies. For an acoustic ejector working at the thickness-mode resonance, the droplet size is primarily determined by the acoustic wavelength, which is proportional to the piezoelectric substrate thickness. In our design, we do not need to lap the bulk piezoelectric lead zirconate titanate (PZT) substrate or deposit high temperature processing PZT thin film, but we use harmonic frequencies of the bulk form to reduce the wavelength. The fabricated acoustic ejector with a size of 1200 × 1200 μm~2 has been shown to be very effective up to the ninth harmonic (180 MHz), continuously ejecting~10 μm diameter droplets, corresponding to droplet volumes as small as 0.5 pl.
机译:这封信报道了使用在其谐波频率下运行的无孔声学喷射器产生的微微升液滴。对于以厚度模式共振工作的声喷射器,液滴尺寸主要由声波长确定,声波长与压电基板的厚度成比例。在我们的设计中,我们不需要重叠大块压电锆钛酸铅钛酸酯(PZT)衬底或沉积高温处理的PZT薄膜,但是我们使用大块形式的谐波频率来减小波长。事实证明,制造的尺寸为1200×1200μm〜2的声喷射器在第九谐波(180 MHz)下非常有效,可以连续喷射直径约10μm的液滴,对应的液滴体积小至0.5 pl。

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