Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al-32 at. %Mo amorphous-nanocrystalline metallic composites

摘要

This study details the resonance properties of 20 nm thick nanoeiectromechanical system scale cantilevers fabricated from a metallic Al-32 at. %Mo nanocomposite. The advantage of the Al-32 at. %Mo alloy is that its strength and near-atomic surface smoothn