Direct measurement of thermal conductivity of aluminum nanowires

摘要

A nanofabricated electrothermal test structure is reported for directly measuring the thermal conductivity of aluminum nanowires near room temperature. Interdigitated nanowires perturb an otherwise symmetric heater-sensor structure analogous to an electrical bridge circuit. Nanowires studied are 100 nm thick with 75, 100, and 150 nm widths. Finite element simulation accounts for complex device geometry. Thermal conductivity and electrical resistivity vary significantly with nanowire dimensions. Electron transport equation models which adequately describe the resistivity data consistently underestimate the thermal conductivity. Incorporating a phonon contribution of ～21 W/m K to the total thermal conductivity is found to accurately describe the measured values.