Ordered amorphous silicon nanoisland arrays and reflection spectral dependence on nanoisland geometrical parameters

摘要

We report an anodic porous alumina mask technique for fabricating orderly hemispherical silicon nanoisland arrays with island diameters of 30-120 nm. Reflection spectral measurements show that the phase transition of incident light can periodically be transferred with changes in geometrical parameters of the ordered arrays. Thus the redshift of the reflection peak with decreasing both sizes of the nanoislands and incident angle of light wave can be explained well on the basis of a modified rigorous vector coupled-wave theory. The simple fabrication technique and reflection spectral redshift of the ordered arrays have potential applications in optical devices and solar cells.