Microscaled and nanoscaled platinum sensors

摘要

We show small and robust platinum resistive heaters and thermometers that are defined by microlithography on silicon substrates. These devices can be used for a wide range of applications, including thermal sensor arrays, programmable thermal sources, and even incandescent light emitters. To explore the miniaturization of such devices, we have developed microscaled and nanoscaled platinum resistor arrays with wire widths as small as 75 nm, fabricated lithographically to provide highly localized heating and accurate resistance (and hence temperature) measurements. We present some of these potential applications of microfabricated platinum resistors in sensing and spectroscopy.