High numerical aperture microlens arrays of close packing

摘要

Closed-packed high numerical aperture (NA) microlens arrays (MLA) are highly desirable for high resolution imaging and high signal-to-noise-ratio detection in micro-optical and integrated optical applications. However, realization of such devices remains technically challenging. Here, we report high quality fabrication of curved surfaces and MLAs by taking the full advantage of surface self-smoothing effect by creating highly reproducible voxels and by adopting an equal-arc scanning strategy. MLA of approximately 100% fill ratio and NA of 0.46, much greater than those ever reported, 0.13, is demonstrated, whose excellent optical performance was approved by the sharp focusing and high resolution imaging.