Characteristics of extreme ultraviolet emission from a discharge-produced potassium plasma for surface morphology application

摘要

We have demonstrated a discharge-produced microplasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). The current-voltage characteristics of microdischarge suggest that the source operates in a hollow cathode mode. By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K~(2+) to K~(4+).